Treffer: Proceedings of the International Ion Engineering Congress
Titel:
Proceedings of the International Ion Engineering Congress : the 7th symposium (1983 International) on Ion Sources and Ion Assisted Technology, ISIAT 83, and the 4th International Conference on Ion and Plasma Assisted Techniques, IPAT 83 ; 12-16 Sept., 1983, Kyoto / Ed.: Toshinori Takagi. Institute of Electrical Engineers of Japan
Teil:
3.
Beteiligt:
Körperschaft:
Veröffentlicht:
Tokyo : Institute of Electrical Engineers of Japan, 1983
Umfang:
17 S., S. 1369 - 1989 : Ill., graph. Darst.
Format:
Sprache:
Englisch
Schriftenreihe/Mehrbändiges Werk:
Proceedings of the International Ion Engineering Congress : the 7th symposium (1983 International) on Ion Sources and Ion Assisted Technology, ISIAT 83, and the 4th International Conference on Ion and Plasma Assisted Techniques, IPAT 83 ; 12-16 Sept., 1983, Kyoto / Ed.: Toshinori Takagi. Institute of Electrical Engineers of Japan
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