Treffer: Modeling and Analysis of SiC Capacitive Pressure Sensors Based on FEA Postprocessing With Infinitesimal Approach

Title:
Modeling and Analysis of SiC Capacitive Pressure Sensors Based on FEA Postprocessing With Infinitesimal Approach
Source:
IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 22(10):9491-9499 May, 2022
Database:
IEEE Xplore Digital Library