(untitled) - Takagi, Toshinori (Hrsg.); Denki Gakkai; International Conference on Ion and Plasma Assisted Techniques (4 : 1983 : Kyōto); Symposium on Ion Sources and Ion Assisted Technology (7. : 1983 : Kyōto); International Ion Engineering Congress (1983 : Kyōto) (Proceedings of the International Ion Engineering Congress : the 7th symposium (1983 International) on Ion Sources and Ion Assisted Technology, ISIAT 83, and the 4th International Conference on Ion and Plasma Assisted Techniques, IPAT 83 ; 12-16 Sept., 1983, Kyoto, 1983)